发明名称 VERTICAL MOUNT MASS FLOW SENSOR
摘要 A thermal mass flow meter for measuring flow rate of a fluid includes a conduit that is configured to receive the fluid and that defines a primary flow path between an inlet and an outlet of the conduit. The conduit is bound at least in part by a sensor receiving surface. A thermal sensor tube has a thermal sensing portion that is mounted relative to the sensor receiving surface in a direction substantially perpendicular to both the primary flow path and the sensor receiving surface. When the thermal mass flow meter is mounted in a vertical direction so that fluid within the conduit flows in the vertical direction along the primary flow path, fluid within the sensor tube flows in a horizontal direction so as to substantially prevent thermal siphoning when the sensor tube is heated.
申请公布号 WO2007061608(A2) 申请公布日期 2007.05.31
申请号 WO2006US43013 申请日期 2006.11.03
申请人 MKS INSTRUMENTS, INC.;DING, JUNHUA;L'BASSI, MICHAEL;ZARKAR, KAVEH, H. 发明人 DING, JUNHUA;L'BASSI, MICHAEL;ZARKAR, KAVEH, H.
分类号 G01F1/684 主分类号 G01F1/684
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