ELECTROSTATIC ACTUATOR

摘要

An actuator comprising a movable electrode (10) and a static electrode (40). This actuator is actuateable using an electrical potential difference that is applied between the movable electrode (10) and the static electrode (40). The actuator comprises static bridge contacts (20, 30) with conductive surfaces (21, 31), and a contact area (15) with a conductive surface (16) facing said bridge contacts (20, 30) located on the movable electrode (10). Wherein an electrically conductive contact is established between the bridge contacts (20, 30), when the movable electrode (10) contacts the static electrode (40). The movable electrode (10, 11, 12, 13) comprises at least two elements (11, 12, 13), a first element (11) and a second element (12). The second element (12) is movable with respect to the first element (11).