OPTICAL SHUTTER ARRAY AND ITS PRODUCTION

摘要

PURPOSE:To prevent the crosstalk between adjacent transparent members by forming transparent members made of an electrooptic material provided with a conductive film extending on a substrate in such a manner that the members are made independent to an array shape by grooves intruding into the substrate to the opposed side faces of the transparent insulating substrate. CONSTITUTION:Plural picture elements 11 which act an optical shutter effect are formed on the transparent insulating substrate 2 and the conductive film 4 extending up to the exposed top surface 21 of the substrate 2 is deposited on the opposed side faces 31. The transparent members 3 made of the electrooptic material consisting of transparent ceramics, etc., having the compsn. consisting of 9atom% La and 65/35mol ratio PbZrO3/PbTiO3 are used for the picture elements 11 constituted in the above-mentioned manner. The sepn. of these picture elements 11 is executed in such a manner that the elements 11 are respectively made independent by the grooves 22 intruding into the substrate 2. Then the elements 11 can be satisfactorily separated electrically and optically from each other. The size of the conductive film 4 over entire region of the opposed side faces of the elements 11 can be increased and the effective optical path length is increased.