| 摘要 |
A valve for preventing reverse-flow is provided to prevent the contamination of a vacuum chamber by preventing quickly safely the generation of the reverse-flow due to an abrupt malfunction of a vacuum pump using a pneumatic cylinder capable of controlling the motion of a reverse-flow preventing plate. A valve for preventing a reverse-flow includes a valve body(10), first and second connection parts, a driving shaft, a reverse-flow preventing plate, and a power source. The first and second connection parts(20,30) are protruded from both end portions of the valve body in order to be connected with a vacuum chamber and an exhaust line prolonged from a vacuum pump. The driving shaft(50) is hinge-connected with an inner upper end portion of the valve body. The reverse-flow preventing plate(40) is connected with one end portion of the driving shaft. The diameter of the reverse-flow preventing plate is larger than the inner diameter of the first connection part and smaller than the inner diameter of the valve body. The reverse-flow preventing plate is used for breaking the flow of fluid in case of an abnormal state of a vacuum line. The power source is connected with the other end portion of the driving shaft in order to control the motion of the reverse-flow preventing plate. A pneumatic cylinder is used as the power source.
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