| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device capable of excellent plasma treatment more uniformly in a plasma surface treatment of a cylindrical base material, and a manufacturing method of a surface treatment cylindrical base material. <P>SOLUTION: The coaxial type plasma surface treatment device has an electrode 1 arranged at outside of a coaxially arranged cylindrical base material 3, and an inside electrode 2 arranged so as to be opposed to the outside electrode 1 through the cylindrical base material 3. A groove, in which gas can flow in axial direction, is formed on the plasma surface treatment side electrode. <P>COPYRIGHT: (C)2007,JPO&INPIT |
