发明名称 |
WORKPIECE TRANSFER DEVICE |
摘要 |
A workpiece transfer assembly for manipulating one or more workpieces, such as semiconductor wafers includes a plurality of coacting arms that include one or more arcuate portions corresponding to an outer diameter of a workpiece. The arcuate portion has a workpiece engaging surface adapted to engage an outer edge of the workpiece. At least one of the coacting arms includes a flexure assembly that allows deformation of the workpiece engaging surface in a direction away from the workpiece in response to pressure on the outer edge of the workpiece from the workpiece engaging surface. |
申请公布号 |
WO2007028074(A3) |
申请公布日期 |
2007.05.31 |
申请号 |
WO2006US34323 |
申请日期 |
2006.08.31 |
申请人 |
AXCELIS TECHNOLOGIES, INC.;GUELER, RICHARD |
发明人 |
GUELER, RICHARD |
分类号 |
H01L21/687;B25J15/00 |
主分类号 |
H01L21/687 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|