MICRO-ELECTROMECHANICAL DEVICE

摘要

Provided is a micro-electromechanical device wherein an electric signal in the high frequency band is processed by a simple element structure. The micro-electromechanical device is composed of an oscillator element having a plurality of electrodes on a substrate and a beam which faces the electrodes and oscillates by electrostatic drive. A high frequency signal is inputted and outputted to and from one of the combinations of the electrodes and the beam.