发明名称 Continuous wet chemical processing, e.g. cleaning, etching, stripping, coating or drying of flat, thin, fragile substrates comprises transporting and processing substrates using absorbent rollers
摘要 <p>Continuous wet chemical processing (cleaning, etching, stripping, coating or drying) of flat, thin, fragile substrates comprises transporting and processing the substrates using absorbent rollers.</p>
申请公布号 DE102005057109(A1) 申请公布日期 2007.05.31
申请号 DE20051057109 申请日期 2005.11.26
申请人 KUNZE-CONCEWITZ, HORST 发明人 KUNZE-CONCEWITZ, HORST
分类号 G03F7/26;H01L21/00 主分类号 G03F7/26
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