发明名称 FORMING METHOD OF BUMP, MANUFACTURING METHOD OF IMAGE SENSOR USING FORMING METHOD, AND SEMICONDUCTOR CHIP AND IMAGE SENSOR FORMED BY MANUFACTURING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a forming method of a bump, a manufacturing method of an image sensor using this forming method, and a semiconductor chip and an image sensor formed by this manufacturing method. <P>SOLUTION: The forming method of a bump, the manufacturing method of an image sensor using this forming method, and the semiconductor chip and the image sensor formed by this manufacturing method are provided. According to the method of forming the bump, the bump is formed in an electroplating process by using a conductive pad with a seed film. The conductive pad is thus used with the seed film, and therefore forming of an additional aluminum pad and seed film is eliminated, thus making it possible to simplify the process. In addition, the conductive pad and the bump are formed by the same substance, and therefore the process can be simplified by using a single substance. <P>COPYRIGHT: (C)2007,JPO&INPIT</p>
申请公布号 JP2007134713(A) 申请公布日期 2007.05.31
申请号 JP20060301914 申请日期 2006.11.07
申请人 SAMSUNG ELECTRONICS CO LTD 发明人 HONG JONG-WOOK
分类号 H01L21/60;H01L27/14 主分类号 H01L21/60
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