| 摘要 |
PROBLEM TO BE SOLVED: To enable stable and accurate measurement using an optical fiber. SOLUTION: Measurement light La of wavelengthλ1 emitted from a light source 21 and reference light Lb of wavelengthλ2 emitted from a light source 21' are guided to the incident end surface of the optical fibers 23 and 23', and are guided to an optical fiber 25 via a multiplexer 24. A light flux emitted from the emission end surface of the optical fiber 25 is divided into P wave and S wave on the surface of a polarization beam splitter 27. Transmitted light flux of the splitter 27 is radiated as the measurement light La to a measured object S and reflected by it, and the reflected light flux is reflected as the reference light Lb by a reference mirror 30 to become multiplexed light Lc. The multiplexed light Lc is divided into light fluxes of wavelengthsλ1 andλ2, and a measuring signal of a sine wave of one period is obtained for (1/2)λ1 movement and (1/2)λ2 movement by the principle of a Michelson interferometer. The light fluxes from two light sources 21 and 21' can be handled as a complete point light source on the emission surface of the optical fiber 25, and the stability of the optical system is acquired. COPYRIGHT: (C)2007,JPO&INPIT
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