发明名称 Structure positioning method for interference of illumination, involves determining optimal position for structure from determined optical data of lens and optical system and wavelength and/or wavelength range
摘要 <p>The method involves inputting and/or determining optical data of a lens used for monitoring and of an optical system provided for illumination. The wavelength and/or wavelength range provided for an illumination light is inputted and/or determined. An optimal position for a structure, which is to be represented on an object, is determined from the optical data of the lens and the optical system and the wavelength and/or wavelength range. The structure is positioned in the optimal position. An emission wavelength is determined and is considered during the position determination. An independent claim is also included for a device for positioning a structure in an illumination beam path of a microscope.</p>
申请公布号 DE102005048922(A1) 申请公布日期 2007.05.31
申请号 DE20051048922 申请日期 2005.10.11
申请人 CARL ZEISS JENA GMBH 发明人 SCHAFFER, JOERG
分类号 G02B21/00 主分类号 G02B21/00
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