| 摘要 |
PROBLEM TO BE SOLVED: To provide a layout analysis method and a layout analysis apparatus, for generating physical parameter distribution for accurately understanding, by a simulation, variation of transistor characteristics due to systematic fluctuations, by improving analysis precision for the transistor characteristics. SOLUTION: The variation distribution of systematic physical parameters dependent on layout is formed into a table, and held. A designed layout pattern is analyzed to select a corresponding table, and the physical parameter distribution 15 is generated based on the table. COPYRIGHT: (C)2007,JPO&INPIT
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