| 摘要 |
PROBLEM TO BE SOLVED: To miniaturize a main chamber (MC) in TFT array inspection apparatuses. SOLUTION: The TFT array inspection apparatus includes an electron gun unit 3 above a main chamber 1 and further includes a stage 2 for a glass substrate within the main chamber 1, and in the stage 2 prepares a Z stage 2d in drivable manner along the Z direction at a position below the electron gun unit 3. In the main chamber 1, since the glass substrate 10 is set to be movable in the Z direction, contacting between the glass substrate 10 and a prober flame 6 can be carried out without interfering with the electron gun unit 3, irrespective of installation positions of the electron gun unit 3 in the main chamber 1. COPYRIGHT: (C)2007,JPO&INPIT
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