| 摘要 |
PROBLEM TO BE SOLVED: To provide a dynamic pressure fluid bearing strong against vibration-impact by a use posture and a state, and further reducing cost, while reducing abrasion of a sliding surface in starting and stopping by rotation. SOLUTION: The dynamic pressure fluid bearing comprises a support 12 and a rotary body 40 rotating around the support 12. In this case, the support 12 and the rotary body 40 are made of plastic, and a tetrahedral amorphous carbon film is formed on at least either sliding surface of the support 12 and the rotary body 40. The tetrahedral amorphous carbon film is also formed by using a filtered cathodic vacuum arc technology method. Dynamic pressure grooves 16 and 18 are formed on an outer peripheral surface of the support 12 before forming the tetrahedral amorphous carbon film on the sliding surface of the support 12. COPYRIGHT: (C)2007,JPO&INPIT
|
