SUBSTRATE SUPPORTING/TRANSFERRING TRAY,申请号KR20077008913-传众专利搜索

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发明名称	SUBSTRATE SUPPORTING/TRANSFERRING TRAY
摘要
申请公布号	KR20070056154(A)	申请公布日期	2007.05.31
申请号	KR20077008913	申请日期	2007.04.19
申请人	CANON ANELVA CORPORATION	发明人	SHIBAGAKI MASAMI;KUREMATSU YASUMI
分类号	H01L21/683	主分类号	H01L21/683
代理机构		代理人
主权项
地址

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