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发明名称
摘要
申请公布号	JP2007514300(A)	申请公布日期	2007.05.31
申请号	JP20060538298	申请日期	2004.10.28
申请人		发明人
分类号	H01L21/3065;B23K9/02;C23C16/505;C23F1/00;H01J7/24;H01L;H01L21/205;H01L21/306;H05B31/26;H05H1/46	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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