SUBSTRATE GRIPPING HAND DEVICE, SUBSTRATE GRIPPING METHOD, SUBSTRATE CONVEYANCE DEVICE USING THE SAME, AND SUBSTRATE PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a light and compact substrate gripping hand device, a substrate gripping method, a substrate conveyance device using it, and a substrate processing device whose outside dimensions are suppressed to the minimum so that the range of the hand operation might become small, for preventing the adhesion of the foreign substance to the substrate to the minimum at the time of conveying substrate. SOLUTION: The substrate gripping hand device comprises a hand board 200; a pair of arms 208 which are provided on this hand board, arranged at the right side and the left side, and brought into contact with the side of the substrate 100; and a driving plate 204 provided on the hand board so as to be contacted with the substrate 100 at the opposite side to the substrate 100 by this arm 208. The substrate 100 is gripped by interlocking between the arm 208 and the driving plate 204. COPYRIGHT: (C)2007,JPO&INPIT