发明名称 |
DEVICE AND METHOD FOR CAPACITIVE MEASUREMENT BY A FLOATING BRIDGE |
摘要 |
The invention concerns a device (1.1) for capacitive measurement by a floating bridge, comprising: a sensor module (2.1) including a measuring electrode (200) and a guard electrode (201) arranged proximate a target electrode (7) connected to a general ground connection, an integrated circuit for capacitive measurement (3) surrounded by a guard (25) whereto said guard electrode (201) is connected, having an input (+)connected to the measuring electrode (200), a ground connection reference connected to the guard (25), an excitation output (OSC) connected to the general ground connection, and a measuring output (S), and a module (5) for measuring the movement and in terms of metrology, in particular dimensional. |
申请公布号 |
WO2007060324(A1) |
申请公布日期 |
2007.05.31 |
申请号 |
WO2006FR02566 |
申请日期 |
2006.11.22 |
申请人 |
NANOTEC SOLUTION;OSSART, FREDERIC;ROZIERE, DIDIER |
发明人 |
OSSART, FREDERIC;ROZIERE, DIDIER |
分类号 |
G01D5/241;G01B7/00;G01R27/26 |
主分类号 |
G01D5/241 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|