发明名称 DEVICE AND METHOD FOR CAPACITIVE MEASUREMENT BY A FLOATING BRIDGE
摘要 The invention concerns a device (1.1) for capacitive measurement by a floating bridge, comprising: a sensor module (2.1) including a measuring electrode (200) and a guard electrode (201) arranged proximate a target electrode (7) connected to a general ground connection, an integrated circuit for capacitive measurement (3) surrounded by a guard (25) whereto said guard electrode (201) is connected, having an input (+)connected to the measuring electrode (200), a ground connection reference connected to the guard (25), an excitation output (OSC) connected to the general ground connection, and a measuring output (S), and a module (5) for measuring the movement and in terms of metrology, in particular dimensional.
申请公布号 WO2007060324(A1) 申请公布日期 2007.05.31
申请号 WO2006FR02566 申请日期 2006.11.22
申请人 NANOTEC SOLUTION;OSSART, FREDERIC;ROZIERE, DIDIER 发明人 OSSART, FREDERIC;ROZIERE, DIDIER
分类号 G01D5/241;G01B7/00;G01R27/26 主分类号 G01D5/241
代理机构 代理人
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