METHOD OF MAKING AN X-Y AXIS DUAL-MASS TUNING FORK GYROSCOPE WITH VERTICALLY INTEGRATED ELECTRONICS AND WAFER-SCALE HERMETIC PACKAGING
摘要
A dual-axis sensor for measuring X and Y components of angular velocity in an X-Y sensor plane is provided. The dual-axis sensor includes a first subsensor for measuring the X component of angular velocity, and a second subsensor for measuring the Y component of angular velocity. The first subsensor and the second subsensor are contained within a single hermetic seal within the dual-axis sensor.
申请公布号
WO2007061963(A2)
申请公布日期
2007.05.31
申请号
WO2006US44919
申请日期
2006.11.17
申请人
INVENSENSE INC.;NASIRI, STEVEN, S.;SEEGER, JOSEPH;LIM, MARTIN;FLANNERY, JR., ANTHONY FRANCIS;CASTRO, ALEXANDER
发明人
NASIRI, STEVEN, S.;SEEGER, JOSEPH;LIM, MARTIN;FLANNERY, JR., ANTHONY FRANCIS;CASTRO, ALEXANDER