Verfahren und Vorrichtung zum Trocknen von Substraten,申请号DE20021015284-传众专利搜索

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发明名称	Verfahren und Vorrichtung zum Trocknen von Substraten
摘要
申请公布号	DE10215284(B4)	申请公布日期	2007.05.31
申请号	DE20021015284	申请日期	2002.04.05
申请人	ASTEC HALBLEITERTECHNOLOGIE GMBH	发明人	NIESE, MATTHIAS;FRANZKE, JOERG
分类号	B65G49/04;H01L21/00;H01L21/67;H01L21/673	主分类号	B65G49/04
代理机构		代理人
主权项
地址

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