| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a linear carrying device for vacuum which achieves both the suppression of a deterioration in cleanliness due to the occurrence of dust and the enhancement of drive speed. <P>SOLUTION: In the linear carrying device for vacuum, a carrying rod 2 which keep one end side inserted into a vacuum process chamber 1 is supported by two static pressure gas bearings 31, 32, and driven by a magnet coupling type drive mechanism 5. The carrying rod 2 and an internal moving body 52 of the drive mechanism 5 coupled to the other end side of the carrying rod 2 are movably accommodated in a rod housing cylinder part 20 equipped with an exhaust means 13. The pressure in the rod housing cylinder part 20 reduced by the exhaust means 13 is set lower than the pressure in the vacuum process chamber 1. <P>COPYRIGHT: (C)2007,JPO&INPIT |
