| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical element comprising a multilayer film for maintaining reflectivity for the light in wider incident angle and in the target wavelength, and also to provide an exposing apparatus comprising the same optical element. <P>SOLUTION: The reflective optical element comprises a multilayer film for enhancing reflectivity of the light. The multilayer film comprises a first laminated material 130 including the first reflection characteristic for almost maintaining the maximum reflectivity at the area near the predetermined wavelength for the incident light within the first incident angle range, and a second laminated material 140 including the second reflection characteristic combined with the first reflection characteristic, for maintaining the constant reflectivity at the area near the predetermined wavelength for the incident light within the second incident angle range wider than the first incident angle range. <P>COPYRIGHT: (C)2007,JPO&INPIT |
