| 摘要 |
<P>PROBLEM TO BE SOLVED: To carry out reticle transfer wherein the occurrence of particles due to the contact between the reticle and the other substance. <P>SOLUTION: The reticle is received and supported in the space between a mounting portion on which the reticle is to be mounted and a lid thereof in this reticle cassette, and the mounting portion comprises an electrode for attracting the pattern surface side of the reticle by an electrostatic force and supporting it. <P>COPYRIGHT: (C)2007,JPO&INPIT |
