| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an extreme ultraviolet ray light source device having a means for removing debris of tin and/or a tin compound adhering to and deposited on a focusing optical system, and using tin for an extreme ultraviolet ray radiative species. <P>SOLUTION: The light source device includes: a material supply means for supplying a material such as tin in order to introduce tin being an extreme ultraviolet ray radiative species into a vessel 10; heating/exciting means 11, 12 and 13 for heating/exciting the material in the vessel 10 to generate high-density and high-temperature plasma; the focusing optical means 2 for reflecting and focusing extreme ultraviolet rays emitted from the plasma; an extraction part 7 for extracting the extreme ultraviolet rays through the focusing optical means 2; and an exhaust means 9 connected to the vessel 10. The light source device includes: a heating means 8 for heating the focusing optical means 2 to liquidize tin and the like adhering to and deposited on the focusing optical means 2; and removal means 5a, 5b... for removing the liquidized tin and the like from the focusing optical means 2. <P>COPYRIGHT: (C)2007,JPO&INPIT |
