METHOD AND COMPOSITIONS FOR DIFFUSION PATTERNING

摘要

METHOD FOR PATTERNING ORGANIC POLYMER LAYERS COMPRISING THE SEQUENTIAL STEPS: A. APPLYING TO A SUBSTRATE AN UNPATTERNED LAYER OF SOLID ACID LABILE POLYMER; B. APPLYING TO THE UNPATTERNED LAYER A PATTERNED SECOND LAYER COMPRISING A LIQUID SOLUTION OF ORGANIC ACID AND VOLATILE SOLVENT; C. HEATING THE PATTERNED LAYER TO EFFECT REMOVAL OF THE VOLATILE SOLVENT FROM THE LAYER AND DIFFUSION OF THE ORGANIC ACID INTO THE UNDERLYING AREAS OF THE FIRST LAYER; AND D. WASHING TILE LAYERS WITH AQUEOUS BASE SOLUTION TO REMOVE TILE SOLUBILIZED ACID LABILE POLYMER FROM THE PATTERNED AREAS OF TILE LAYERS.