METHODS OF FORMING CARBON NANOTUBES IN A WIRING PATTERN AND RELATED DEVICES

摘要

A method of forming a carbon nanotube includes forming a cavity between a substrate and a first layer on the substrate. The cavity extends in a wiring pattern and includes a metal catalyst pattern in the cavity. The carbon nanotube is formed from the metal catalyst pattern and extends inside the cavity along the wiring pattern. Related methods and devices are also discussed.