| 摘要 |
The invention provides resonant vibratory sensors to render such resonant vibratory sensors more beneficial than conventional MEMS-based and non-MEMS-based resonant vibratory sensors for various usage applications, such as portable applications requiring navigation-grade performance. The resonant vibratory sensors include as examples an oscillator, a vibratory gyroscope and a vibratory accelerometer. In one embodiment, the resonant vibratory sensor is a disk resonator gyroscope. The improved resonant vibratory sensors employ materials having an ultra low thermal expansion coefficient, which provides an improved thermoelastic quality factor.
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