| 摘要 |
A valveless micro impedance pump including a bottom layer, a middle layer, a top layer and a piezoelectric element. The middle layer and the top layer are sealed to form the water inlets/outlets, flow way, upper and lower vibration membranes and boss of the micropump. The piezoelectric element is fixed on the boss and the fixing seat. By means of the electric field effect, the upper and lower vibration membranes are pushed by the piezoelectric element through the boss. The medium within the flow way is squeezed to flow toward the water inlets/outlets on two sides. The upper and lower vibration membranes have different structures. Also, the hardness of the fixing seat is different from the hardness of the bottom layer. This leads to difference in impedance. Therefore, the wave of the medium can be transmitted.
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