发明名称 Semiconductor Device Having Enhanced Photo Sensitivity and Method for Manufacture Thereof
摘要 Provided are a semiconductor device and a method for its manufacture. In one example, the method includes forming an isolation structure having a first refraction index over a sensor embedded in a substrate. A first layer having a second refraction index that is different from the first refraction index is formed over the isolation structure. The first layer is removed from at least a portion of the isolation structure. A second layer having a third refraction index is formed over the isolation structure after the first layer is removed. The third refraction index is substantially similar to the first refraction index.
申请公布号 US2007120160(A1) 申请公布日期 2007.05.31
申请号 US20070627883 申请日期 2007.01.26
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 HSU TZU-HSUAN;YAUNG DUN-NIAN;WUU SHOU-GWO;CHIEN HO-CHING;TSENG CHIEN-HSIEN;LIN JENG-SHYAN
分类号 H01L31/113;H01L29/84 主分类号 H01L31/113
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