| 摘要 |
PROBLEM TO BE SOLVED: To provide a diamond-like carbon (DLC) thin film useful for the miniaturization, the reduction in cost, and the high performance of various optical devices. SOLUTION: First, a mask 12 with a refractive index distribution pattern transferred is tightly adhered on the DLC thin film 11. The surface of the mask 12 is obliquely irradiated with, for example, an ion beam such as helium and argon. Regarding the part irradiated with the ion beam through the transmissive part of the mask 12, the refractive index changes as shown in Fig. 11-1. On the other hand, regarding a part shielded by the shielding part of the mask 12 from the irradiation with the ion beam, the refractive index never changes as shown in Fig. 11-2. Consequently, by changing the pattern on the mask, the refractive index distribution of the DCL thin film 11 is controlled. COPYRIGHT: (C)2007,JPO&INPIT
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