发明名称 Flash memory device having recessed floating gate and method for fabricating the same
摘要 A flash memory device and a method for fabricating the same are provided. The flash memory device includes: an active region having a plurality of surface regions and a plurality of recess regions formed lower than the surface regions; a tunnel oxide layer formed over the recess regions; a plurality of recessed floating gates formed over the tunnel oxide layer to be buried into the recess regions; a plurality of dielectric layers over the recessed floating gates; and a plurality of control gates over the dielectric layers.
申请公布号 US2007122976(A1) 申请公布日期 2007.05.31
申请号 US20060416838 申请日期 2006.05.02
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KIM JAE-HONG
分类号 H01L21/336 主分类号 H01L21/336
代理机构 代理人
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