| 摘要 |
<P>PROBLEM TO BE SOLVED: To surely and easily support and fix a substrate positioned at a predetermined position at a predetermined height. <P>SOLUTION: The substrate support device is used to support and fix a substrate positioned at a component mounting position by using a substrate fixing pin 46 prepared on a backup plate 44. The substrate fixing pin 46 comprises a base 50 positioned on the backup plate, a movable pin 52 attached to the base in such a manner that it can move back and forth in the substrate direction, and an energizing means 54 for energizing the movable pin toward the substrate. The substrate fixing pin 46 also includes a pin fixing means 60 which consists of an elastic hollow object having a hole 62 surrounding the movable pin 52. A fluid press-fit in the hollow body causes the hole 62 to apply pressure to the movable pin 52, and the movable pin 52 is fixed to the base 50 by the pressure. <P>COPYRIGHT: (C)2007,JPO&INPIT |
