| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and system for inspecting a circuit capable of raising the inspection efficiency by appropriately determining use/disuse of inspection. SOLUTION: A control section 20 of each inspection device 2 determines whether to perform inspection in response to an influence on inspection of itself by the inspection of the other inspection device, and controls whether to perform inspection in the inspection device. When the inspection by the other inspection device affects the inspection by each inspection device 2, synchronousness with the other inspection device is established in cooperation with a communication section 22, an inspection condition of each inspection block is set so that the inspection by each inspection device is not affected, and then the inspection is performed. When the inspection by each inspection device 2 is not affected by the inspection by the other inspection device (or the influence is eliminated), the control section 20 of each inspection device 2 performs the inspection by each inspection device 2 asynchronously in a preset inspection order. COPYRIGHT: (C)2007,JPO&INPIT
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