MESSWANDLEREINSATZ, VERFAHREN ZU SEINER HERSTELLUNG UND VERWENDUNG FUER EINEN AUFNEHMER ZUR MESSUNG MECHANISCHER GROESSEN.

摘要

A transducer insert for installing in sensors for measuring mechanical variables includes a semi-conductor body with a measuring diaphragm part of which has diffused-in strain-sensitive resistance paths or capacitor electrodes and also connecting contacts on one side. The semi-conductor body is connected to a base body of insulating material, preferably by an anodic method, through which electrically conductively coated channels pass. The channels open at a recess in the base body which is bridged by the measuring diaphragm part. The electrically conductive layers of the channels extend along the recess to the vicinity of the connecting contacts of the semi-conductor body and are directly connected thereto in an electrically conductive manner by the so-called corner drop method, e.g. by glueing, soldering or thermo-compression. A central projection can be provided in the recess of the base body which creates a deflection limit for the measuring diaphragm part. The transducer insert can be manufactured according to the so-called batch method.