| 摘要 |
A spatial light modulator includes a mirror plate comprising a reflective upper surface, a lower surface having a conductive surface portion, and a substrate portion having a first cavity having an opening on the lower surface, a second cavity in the substrate portion, and a membrane over the second cavity. The modulator includes a substrate comprising an upper surface, a hinge support post in connection with the upper surface, a hinge component supported by the hinge support post and in connection with the mirror plate to facilitate a rotation of the mirror plate, and an upright landing tip in connection with the upper surface of the substrate. The hinge component is extends into the first cavity. The upright landing tip is configured to contact the membrane over the second cavity in the substrate portion of the mirror plate to stop the rotation of the mirror plate at a predetermined orientation.
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