摘要 |
The invention relates to a calibration standard, especially for the calibration of devices for the non-destructive measurement of the thickness of thin layers with a carrier plate ( 16 ) of a basic material and a standard ( 17 ) applied on the carrier plate ( 16 ), said standard having the thickness of the layer at which the device is to be calibrated, wherein that a holding device ( 22 ) arranged on the basic body ( 12 ) of the calibration standard ( 11 ) receives at least the standard ( 17 ) to the basic body ( 12 ) such that upon setting a measuring probe of the device for the non-destructive measurement of thin layers onto the standard ( 17 ), its position will be changeable by at least one degree of freedom.
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