<p>A microwave introduction device includes a microwave generator for generating microwaves of a predetermined frequency, a mode converter for converting the microwaves into a predetermined amplitude mode, a flat antenna member arranged toward a predetermined space, and a coaxial waveguide connecting the mode converter and the flat antenna member for propagation of the microwaves. The coaxial waveguide has a central conductor formed into a cylindrical shape having an inner diameter D1 not smaller than a first predetermined value and an outer conductor also formed into a cylindrical form. The ratio r1/r2 of the radius r1 of the inner diameter of the outer conductor against the radius r2 of the outer diameter of the central conductor is maintained at a second predetermined value. The outer conductor has an inner diameter D2 not greater than the a third predetermined value.</p>
申请公布号
WO2007060867(A1)
申请公布日期
2007.05.31
申请号
WO2006JP322749
申请日期
2006.11.15
申请人
TOKYO ELECTRON LIMITED;TIAN, CAIZHONG;YUASA, TAMAKI;NOZAWA, TOSHIHISA