发明名称 MICROWAVE INTRODUCTION DEVICE
摘要 <p>A microwave introduction device includes a microwave generator for generating microwaves of a predetermined frequency, a mode converter for converting the microwaves into a predetermined amplitude mode, a flat antenna member arranged toward a predetermined space, and a coaxial waveguide connecting the mode converter and the flat antenna member for propagation of the microwaves. The coaxial waveguide has a central conductor formed into a cylindrical shape having an inner diameter D1 not smaller than a first predetermined value and an outer conductor also formed into a cylindrical form. The ratio r1/r2 of the radius r1 of the inner diameter of the outer conductor against the radius r2 of the outer diameter of the central conductor is maintained at a second predetermined value. The outer conductor has an inner diameter D2 not greater than the a third predetermined value.</p>
申请公布号 WO2007060867(A1) 申请公布日期 2007.05.31
申请号 WO2006JP322749 申请日期 2006.11.15
申请人 TOKYO ELECTRON LIMITED;TIAN, CAIZHONG;YUASA, TAMAKI;NOZAWA, TOSHIHISA 发明人 TIAN, CAIZHONG;YUASA, TAMAKI;NOZAWA, TOSHIHISA
分类号 H01L21/3065;H05H1/46 主分类号 H01L21/3065
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