OPTICAL HYDROGEN SENSING MATERIAL USING ION IRRADIATION AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing hydrogen sensing materials capable of sensing hydrogen on the basis of changes in optical transmittance due to the adsorption of hydrogen to the materials. SOLUTION: The hydrogen sensing material senses hydrogen by monitoring changes in optical transmittance when in contact with an atmosphere containing hydrogen. (1) A principal component of the hydrogen sensing material is tungsten oxide, and its shape is that of a membrane. (2) The concentration of coloration (optical transmittance) due to the adsorption of hydrogen is adjusted through the use of ion irradiation after film deposition. (3) A catalyst is deposited on the surface of the hydrogen sensing material. (4) The hydrogen sensing material reacts with hydrogen at a room temperature (approximately at 20°C) and is colored. Such hydrogen sensing material are manufactured in the present method. COPYRIGHT: (C)2007,JPO&INPIT