| 摘要 |
PROBLEM TO BE SOLVED: To provide a moment resistant countermeasure static pressure gas bearing mechanism for supporting a rod on which a fluctuating load acts while suppressing the deterioration in cleanliness due to the occurrence of dust and the progress of bearing abrasion. SOLUTION: The mechanism is equipped with a first and second static pressure gas bearings 31, 32 for supporting a rod 2 at two parts in the axial directions. The first static pressure gas bearing 31 is fixedly supported. The second static pressure gas bearing 32 is supported through the medium of a movable supporting mechanism 34. The movable supporting mechanism is equipped with an actuator 35 for relatively displacing a shaft center of the second static pressure gas bearing 32 to the first static pressure gas bearing 31 in a direction of suppressing contact between two static pressure gas bearings and a part of a surface of the rod supported therein in response to load acting on the rod 2. COPYRIGHT: (C)2007,JPO&INPIT
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