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发明名称
VERFAHREN ZUR PLASMAGESTUETZTEN ABSCHEIDUNG VON MISCH- ODER MEHRFACHSCHICHTEN
摘要
申请公布号
DD263423(A3)
申请公布日期
1989.01.04
申请号
DD19870302066
申请日期
1987.04.23
申请人
VEB HOCHVAKUUM DRESDEN,DD
发明人
SCHULZE,DIETMAR,DD;WILBERG,RUEDIGER,DD
分类号
C23C14/14;C23C14/32;(IPC1-7):C23C14/32
主分类号
C23C14/14
代理机构
代理人
主权项
地址
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