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发明名称
Poliervorrichtung und Verfahren zum Polieren von Werkstücken
摘要
申请公布号
DE602004003881(T2)
申请公布日期
2007.05.31
申请号
DE200460003881T
申请日期
2004.11.19
申请人
DOI, TOSHIRO;FUJIKOSHI MACHINERY CORP.
发明人
DOI, TOSHIRO;PHILIPOSSIAN, ARA;DENARDIS, DARREN
分类号
B24B37/04;B24B57/02;H01L21/306;H01L21/3105;H01L21/321
主分类号
B24B37/04
代理机构
代理人
主权项
地址
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