| 发明名称 |
Metal thin film and method of manufacturing the same, dielectric capacitor and method of manufacturing the same, and semiconductor memory device |
| 摘要 |
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| 申请公布号 |
EP1587146(A3) |
申请公布日期 |
2007.05.30 |
| 申请号 |
EP20050008277 |
申请日期 |
2005.04.15 |
| 申请人 |
SEIKO EPSON CORPORATION |
发明人 |
SAWASAKI, TATSUO;KUROKAWA, KENICHI;TAGAWA, TERUO;TSUCHIYA, KENICHI |
| 分类号 |
H01L21/28;H01L21/3205;H01B5/14;H01B13/00;H01L21/02;H01L21/20;H01L21/285;H01L21/316;H01L21/82;H01L21/8246;H01L27/10;H01L27/105;H01L27/108;H01L27/115;H01L29/92 |
主分类号 |
H01L21/28 |
| 代理机构 |
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