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发明名称
MESOPOROUS SILICA FILM FROM A SOLUTION CONTAINING A SURFACTANT AND METHODS OF MAKING SAME
摘要
申请公布号
EP1144310(B1)
申请公布日期
2007.05.30
申请号
EP19990967535
申请日期
1999.12.23
申请人
BATTELLE MEMORIAL INSTITUTE
发明人
DOMANSKY, KAREL;FRYXELL, GLEN, E.;LIU, JUN;KOHLER, NATHAN, J.;BASKARAN, SURESH;LI, XIAOHONG;THEVUTHASAN, SUNTHARAMPILLAI;COYLE, CHRISTOPHER, A.;BIRNBAUM, JEROME, C.
分类号
C01B37/02;C01B33/12;B01J19/00;H01L21/316
主分类号
C01B37/02
代理机构
代理人
主权项
地址
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