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发明名称
ELECTRODELESS LAMP FOR EMITTING ULTRAVIOLET AND/OR VACUUM ULTRAVIOLET RADIATION
摘要
申请公布号
EP1789991(A2)
申请公布日期
2007.05.30
申请号
EP20050796590
申请日期
2005.09.08
申请人
AXCELIS TECHNOLOGIES, INC.
发明人
JANOS, ALAN;PACK, MALCOLM;KAMAREHI, MOHAMMAD;COLSON, MICHAEL
分类号
H01J61/30;C03C3/06;C03C4/00;H01J65/04
主分类号
H01J61/30
代理机构
代理人
主权项
地址
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