Infrared microsensor

摘要

The sensor has a measurement chamber (2) filled with fluid, which absorbs radiation (1) selectively. The chamber has a recess, which is positioned in a substrate. The recess is covered partially on an active side by a window layer (7) forming an inflow window. A standpipe (11) stays in connection with the measurement chamber. The fluid forms a column, which varies in height, in the pipe. A unit is provided for measuring the height. An independent claim is also included for a method for selection of sensor arrays.