DRY ETCHING APPARATUS,申请号KR20050113213-传众专利搜索

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发明名称	DRY ETCHING APPARATUS
摘要
申请公布号	KR20070055010(A)	申请公布日期	2007.05.30
申请号	KR20050113213	申请日期	2005.11.25
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	KIM, WAN KEUN
分类号	H01L21/3065	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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