发明名称 CONTACTLESS PANEL ALIGNMENT APPARATUS
摘要 A panel alignment apparatus is provided to restrain the contamination of a panel by aligning the panel without the contact to a bottom surface using an air floating plate. A panel alignment apparatus includes an air floating plate, an alignment unit, and a support plate. The air floating plate is driven together with an angle control unit(30). The air floating plate has a plurality of air supply nozzles spaced apart from each other. The alignment unit(40) has a reference portion(41) at both sides of a predetermined portion adjacent to the air floating plate. The support plate(50) is installed under the air floating plate in order to support the angle control unit and a hinge portion. The alignment unit is composed of a plurality of bearings(42) and bearing exposing holes for exposing the surface of each bearing to the outside on the reference portion of the alignment unit.
申请公布号 KR100725563(B1) 申请公布日期 2007.05.30
申请号 KR20050119528 申请日期 2005.12.08
申请人 PHOENIX DIGITAL TECH CO., LTD. 发明人 AN, JOUNG PILL;KANG, JIN MO
分类号 H01L21/68;B65G49/02 主分类号 H01L21/68
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