发明名称 |
CONTACTLESS PANEL ALIGNMENT APPARATUS |
摘要 |
A panel alignment apparatus is provided to restrain the contamination of a panel by aligning the panel without the contact to a bottom surface using an air floating plate. A panel alignment apparatus includes an air floating plate, an alignment unit, and a support plate. The air floating plate is driven together with an angle control unit(30). The air floating plate has a plurality of air supply nozzles spaced apart from each other. The alignment unit(40) has a reference portion(41) at both sides of a predetermined portion adjacent to the air floating plate. The support plate(50) is installed under the air floating plate in order to support the angle control unit and a hinge portion. The alignment unit is composed of a plurality of bearings(42) and bearing exposing holes for exposing the surface of each bearing to the outside on the reference portion of the alignment unit.
|
申请公布号 |
KR100725563(B1) |
申请公布日期 |
2007.05.30 |
申请号 |
KR20050119528 |
申请日期 |
2005.12.08 |
申请人 |
PHOENIX DIGITAL TECH CO., LTD. |
发明人 |
AN, JOUNG PILL;KANG, JIN MO |
分类号 |
H01L21/68;B65G49/02 |
主分类号 |
H01L21/68 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|