发明名称 Wafer level manufacturing of optical elements
摘要 <p>A method of making optical elements on a wafer level comprising: - making a master including an array of optical elements; - embossing a replica of said array of optical elements by applying said master to an embossable material; and - dicing said replica to form individual optical elements.</p>
申请公布号 EP1785746(A3) 申请公布日期 2007.05.30
申请号 EP20060120847 申请日期 1998.10.02
申请人 DIGITAL OPTICS CORPORATION 发明人 HARDEN, BRIAN;KATHMAN, ALAN;FELDMAN, MICHAEL R.
分类号 G02B1/04;G02B5/00;G02B6/12;G02B6/42;G03F7/00;G03F9/00;G11B7/12;G11B7/135;G11B7/22;H01L25/16;H01L27/00;H01L27/146;H01L31/12;H01S3/00;H01S5/00;H01S5/022 主分类号 G02B1/04
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