| 摘要 |
A stacker crane is provided to prevent a substrate and a clean room from being contaminated by surely preventing leakage of metal dust generated in a power delivering process. A stacker crane includes an arm(101), a rotating cover(102), and a coupling unit(103). The arm embraces an exterior of a power delivering part and rotates with a robot arm by being coupled to the robot arm. A suspended sprocket receiving part(104) and the rotating cover is installed with a gap from each other not to interfere each other in a driving state. The cover is coupled to a lower part of the arm to fill a gap between the arm and the sprocket receiving part. The coupling part couples the arm and the cover. A sill(102a) is formed near a side of the sprocket receiving part by being protruded from an upper part inside of the cover.
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