Method for forming a metal line of semiconductor device using a damascene process,申请号KR20000086272-传众专利搜索

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发明名称	Method for forming a metal line of semiconductor device using a damascene process
摘要
申请公布号	KR100723465(B1)	申请公布日期	2007.05.30
申请号	KR20000086272	申请日期	2000.12.29
申请人		发明人
分类号	H01L21/28	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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